| 摘要 |
The present invention relates to a substrate container cover opening and closing device and, more specifically, to a substrate container cover opening and closing device, in which nitrogen supply to a driving part in the cover opening and closing device and evacuation are carried out after sealing by the forward movement and close contact of a cover transfer device, molecular impurities are removed by carrying out nitrogen supply and evacuation after completely shielding the inside of an FOUP from the outside by moving the cover transfer device backwards such that one entire surface on the outside of the cover of the FOUP comes into close contact with a cover sealing O-ring, and impurity measurement and humidity measurement can be separately or simultaneously progressed using an impurity checking device and a hygrometer. To this end, the present invention prevents impurities from being introduced to the inside of the FOUP due to the operation of the cover transfer device, wherein a body for forming the cover opening and closing device, that is, a cover opening and closing device case is mounted on the driving part, an O-ring for coming into close contact with a frame so as to seal the inside is provided on one outer surface facing the frame, and the cover sealing O-ring of a silicon material, which can seal the one entire surface on the outside of the cover of the FOUP, is also included on one inner surface of the cover opening and closing device case. |
