发明名称 MEMS OSCILLATOR
摘要 A device comprising, a mirror which is configured to oscillate in response to an oscillation signal, wherein the device is configured such that oscillation of the mirror will induce a signal; and a circuit in operable cooperation with the mirror such that an induced signal can be measured by the circuit and wherein the circuit is configured to provide an oscillation signal proportional to the measured induced signal; wherein the device is configured such that the mirror can receive the oscillation signal so that the oscillation signal is filtered due to oscillation limitations of mirror, to provide a filtered signal.
申请公布号 US2016142687(A1) 申请公布日期 2016.05.19
申请号 US201514850858 申请日期 2015.09.10
申请人 INTEL CORPORATION 发明人 CHEVALLAZ Eric;PASTRE Marc;KRUMMENACHER Francois;MAHER Kayal
分类号 H04N9/31;G02B26/08 主分类号 H04N9/31
代理机构 代理人
主权项
地址 Santa Clara CA US