Doping Profile Measurement Using Terahertz Time Domain Spectroscopy (THz-TDS)

摘要

A system and method for determining a doping profile of a sample includes a generator and at least one detector of terahertz light of multiple frequencies, configured to operate in a transmission and/or reflection mode; a materials refractive index library; and an inverse algorithm that can match simulated spectra using a trial doping profile and the materials library with the measured spectra from a sample, and map out or measure an activated doping profile into, or a free carrier distribution into, the interior of the sample.

主权项

1. A system for determining a doping profile of a sample comprising:
a generator of terahertz light of multiple frequencies; a first detector of terahertz light of multiple frequencies, wherein the generator and first detector are configured to operate in a transmission or reflection mode with respect to exposing a sample of unknown doping profile and an undoped reference sample to terahertz frequency radiation and detecting a measured spectra of terahertz frequency; a materials refractive index library comprising terahertz complex refractive index as a function of doping; and a processor comprising an inverse algorithm that can match simulated spectra using a trial doping profile and the materials library with the measured spectra from the sample, and map out or measure an activated doping profile into, or a free carrier distribution into, the interior of the sample.