NOVEL LAMINATE,申请号WO2015JP05605-传众专利搜索

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发明名称	NOVEL LAMINATE
摘要	A laminate which comprises an Si layer and a metal oxide layer, and wherein the film thickness of an SiO2 layer on the metal oxide layer-side surface of the Si layer is 0.0-15.0 nm.
申请公布号	WO2016075927(A1)	申请公布日期	2016.05.19
申请号	WO2015JP05605	申请日期	2015.11.10
申请人	IDEMITSU KOSAN CO.,LTD.	发明人	TOMAI, SHIGEKAZU;KAWASHIMA, EMI;HAYASAKA, HIROMI;UEOKA, YOSHIHIRO;SHIBATA, MASATOSHI;YANO, KOKI;INOUE, KAZUYOSHI;SEKIYA, TAKASHI;TSURUMA, YUKI;TAKESHIMA, MOTOHIRO
分类号	H01L29/26;H01L21/28;H01L21/363;H01L29/06;H01L29/47;H01L29/872	主分类号	H01L29/26
代理机构		代理人
主权项
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