THIN FILM TRANSISTOR AND A MANUFACTURING METHOD THEREOF, ARRAY SUBSTRATE AND A MANUFACTURING METHOD THEREOF, DISPLAY DEVICE

摘要

A thin film transistor and a manufacturing method thereof, an array substrate and a manufacturing method thereof, and a display device are disclosed. The manufacturing method of the array substrate includes depositing an amorphous silicon thin film layer on a base substrate; performing a patterning process on the amorphous silicon thin film layer, so as to form a pattern with multiple small pores at a surface of the amorphous silicon thin film layer. With this method, when a laser annealing treatment of amorphous silicon is performed, the molten silicon after melting fills the space of small pores at a surface of the amorphous silicon thin film layer firstly, thereby avoiding forming a protruded grain boundary that is produced because the excess volume of polysilicon is squeezed.

主权项

1. A manufacturing method of an array substrate, comprising
depositing an amorphous silicon thin film layer on a base substrate; and performing a patterning process on the amorphous silicon thin film layer, so as to form a pattern with multiple small pores at a surface of the amorphous silicon thin film layer.