SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

The present invention relates to a semiconductor device which can reduce wiring process costs by a multi-functional single thin film seed layer having seed layer properties and diffusion preventing layer properties at the same time, and can increase productivity of a semiconductor element, and to a manufacturing method thereof. The semiconductor element comprises: a substrate; a conductive line on the substrate; and a seed layer between the substrate and the conductive line. The seed layer includes cobalt titanium nitride.