发明名称 SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS AND MOVABLE BODY
摘要 PROBLEM TO BE SOLVED: To provide a sensor element capable of reducing a noise signal due to electric charge generated in coupling sections, and further to provide a physical quantity sensor provided with the sensor element, an electronic apparatus and a movable body.SOLUTION: A sensor element of the present invention comprises: a vibration body including a base portion 21 and detection vibration arms 231 and 232 extending from the base portion 21; a first detection electrode and a second detection electrode disposed on the detection vibration arms 231 and 232; a support section 25; coupling sections 261 through 264 coupling the base portion 21 (vibration body) and the support section 25; and a first electrode and a second electrode disposed on the coupling sections 261 and 262. The first electrode is disposed at one side and the second electrode is disposed at the other side with respect to bisecting surfaces bisecting the coupling sections 261 and 262 in a thickness direction. The first electrode is electrically disposed to the first detection electrode, and the second electrode is electrically connected to the second detection electrode or a constant potential source.SELECTED DRAWING: Figure 1
申请公布号 JP2016085185(A) 申请公布日期 2016.05.19
申请号 JP20140219779 申请日期 2014.10.28
申请人 SEIKO EPSON CORP 发明人 SUGIYAMA TAKATOSHI;YAMAGUCHI KEIICHI;NISHIZAWA RYUTA;NAKAGAWA HIROSHI
分类号 G01C19/5607;H01L41/047;H01L41/113 主分类号 G01C19/5607
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