| 摘要 |
This band-narrowing laser device may comprise: a laser chamber; a band-narrowing module that includes a grating, and that narrows the band of a laser beam outputted from the laser chamber and returns the laser beam to the laser chamber; a housing that houses the band-narrowing module; three mounts that are fixed to the housing; and a housing moving device that supports the housing and the band-narrowing module by supporting each of the three mounts, and that moves the band-narrowing module by moving the housing with respect to the laser chamber in a direction substantially perpendicular to the dispersion plane of the grating. |
