| 摘要 |
The present invention relates to an interior material for a plasma treating apparatus and a production method thereof. More specifically, the purpose of the present invention is to provide a method for forming an interior material on an interior component in a vacuum chamber which provides a plasma treating space, so as to complement a portion of a finely formed heat crack. To this end, the method for producing the interior material for the plasma treating apparatus comprises the following steps: forming, on an interior component of a vacuum chamber which provides a plasma treating space, a thermal spray coating layer by means of a first ceramic material; forming a surface melting layer which has denser particle distribution than the thermal spray coating layer by melting some portion of the surface of the thermal spray coating layer; and forming a surface complementation layer on the surface melting layer with a second ceramic material by applying an aerosol deposition method. |
