发明名称 PUMP, PUMP DEVICE, AND LIQUID SUPPLY SYSTEM
摘要 PROBLEM TO BE SOLVED: To inhibit accumulation of a liquid.SOLUTION: A pump 100 includes: an elastic tube 102 in which a liquid, a transfer object, circulates; a tube housing 104 covering the outer side of the tube 102 and retaining a gas in an internal space V between itself and an outer surface of the tube 102; and an electropneumatic regulator RE which supplies the gas to the internal space V and discharges the gas from the internal space V.SELECTED DRAWING: Figure 6
申请公布号 JP2016084803(A) 申请公布日期 2016.05.19
申请号 JP20150144946 申请日期 2015.07.22
申请人 TOKYO ELECTRON LTD 发明人 SASA TAKUSHI;ISHIMARU DAISUKE;OKUBO TAKAHIRO;YUMOTO TOMOYUKI;MUTA TOMOHIKO
分类号 F04B43/10;H01L21/027 主分类号 F04B43/10
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