发明名称 |
PUMP, PUMP DEVICE, AND LIQUID SUPPLY SYSTEM |
摘要 |
PROBLEM TO BE SOLVED: To inhibit accumulation of a liquid.SOLUTION: A pump 100 includes: an elastic tube 102 in which a liquid, a transfer object, circulates; a tube housing 104 covering the outer side of the tube 102 and retaining a gas in an internal space V between itself and an outer surface of the tube 102; and an electropneumatic regulator RE which supplies the gas to the internal space V and discharges the gas from the internal space V.SELECTED DRAWING: Figure 6 |
申请公布号 |
JP2016084803(A) |
申请公布日期 |
2016.05.19 |
申请号 |
JP20150144946 |
申请日期 |
2015.07.22 |
申请人 |
TOKYO ELECTRON LTD |
发明人 |
SASA TAKUSHI;ISHIMARU DAISUKE;OKUBO TAKAHIRO;YUMOTO TOMOYUKI;MUTA TOMOHIKO |
分类号 |
F04B43/10;H01L21/027 |
主分类号 |
F04B43/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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