| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic substrate excellent in high-temperature tolerance.SOLUTION: The ceramic substrate has a plurality of spindle-shaped holes in the thickness direction in the cross section perpendicular to the principal surface, each of which holes has the major axis in the direction along the principal surface. Since the spindle-shaped hole has the major axis along the principal surface direction, mechanical characteristics of this ceramic substrate are made higher than those of such another ceramic substrate that each of the plurality of spindle-shaped holes has the major axis along the thickness direction. Moreover, since growth of a minute crack caused by thermal loads to be imposed repeatedly by firing or heat treatment can be suppressed, the ceramic substrate can be allowed to have excellent high-temperature tolerance and can be used over a long period of time.SELECTED DRAWING: Figure 1 |
