发明名称 SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS AND MOVABLE BODY
摘要 PROBLEM TO BE SOLVED: To provide a sensor element capable of effectively reducing unnecessary vibration, and further to provide a physical quantity sensor provided with the sensor element, an electronic apparatus and a movable body.SOLUTION: A sensor element comprises: a base portion 21; a vibration body including drive vibration arms 221 and 222 extending in a y-axis direction from the base portion 21; and coupling portions 261 through 264 supporting the vibration body. When a frequency of a drive vibration mode where the drive vibration arms 221 and 222 are driven to vibrate in an x-axis direction is represented by fd and a frequency of a y direction vibration mode where the vibration body vibrates in the y-axis direction in accompaniment with deformation of the coupling portions 261 through 264 is represented by fy, fd and fy satisfy a relation of 0.7≤fd/fy.SELECTED DRAWING: Figure 1
申请公布号 JP2016085183(A) 申请公布日期 2016.05.19
申请号 JP20140219777 申请日期 2014.10.28
申请人 SEIKO EPSON CORP 发明人 NAKAGAWA HIROSHI
分类号 G01C19/5607;G01C19/5628;H01L41/113;H01L41/253 主分类号 G01C19/5607
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