发明名称 |
SUB-VOLT DRIVE 100 GHZ BANDWIDTH ELECTRO-OPTIC MODULATOR |
摘要 |
Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers having strong dielectric constant dispersion. |
申请公布号 |
US2016139486(A1) |
申请公布日期 |
2016.05.19 |
申请号 |
US201414891934 |
申请日期 |
2014.06.12 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
Dagli Nadir |
分类号 |
G02F1/225;G02F1/017;G02B6/132;G02B6/125 |
主分类号 |
G02F1/225 |
代理机构 |
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代理人 |
|
主权项 |
1. An electro-optical modulator comprising:
a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer; and a coplanar waveguide, wherein signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers having strong dielectric constant dispersion. |
地址 |
Oakland CA US |