发明名称 SUB-VOLT DRIVE 100 GHZ BANDWIDTH ELECTRO-OPTIC MODULATOR
摘要 Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers having strong dielectric constant dispersion.
申请公布号 US2016139486(A1) 申请公布日期 2016.05.19
申请号 US201414891934 申请日期 2014.06.12
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 Dagli Nadir
分类号 G02F1/225;G02F1/017;G02B6/132;G02B6/125 主分类号 G02F1/225
代理机构 代理人
主权项 1. An electro-optical modulator comprising: a Mach-Zehnder interferometer formed in a substrate removed semiconductor layer; and a coplanar waveguide, wherein signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers having strong dielectric constant dispersion.
地址 Oakland CA US