| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method by means of which an electrical discharge can be easily generated and maintained in a chamber.SOLUTION: A first electrode (30) is operated to be a cathode relative to a second electrode (16), and gas is introduced into a chamber (14) by the first electrode (30). The first electrode (30) has a closed antechamber (32) with a metal wall (34). A tube (36) consisting of a material different from that of the wall (34) is provided, and the gas is introduced from the antechamber (32) into the chamber (14) through the tube. A front portion of the tube (36) is embedded in the wall (34) of the antechamber (32), and a rear portion of the tube (36) has a free end projecting into the antechamber (32). A stable electrical discharge can be generated thereby in a particularly easy manner.SELECTED DRAWING: Figure 2 |
