| 摘要 |
PROBLEM TO BE SOLVED: To provide an imaging pattern simulation system and an imaging pattern simulation method which allow for simulation in an extremely short time, even when the shape of a part of a mask pattern is changed, without consuming a large amount of memory.SOLUTION: An imaging pattern simulation system includes division means for dividing a mask pattern into a plurality of small patterns, library creation storage means for calculating and storing an imaging pattern formed by a transmitted beam of each small pattern, first imaging pattern creation means for creating a first imaging pattern, by bonding the imaging patterns corresponding to the small pattern based on the library, binding wave calculation means for obtaining a binding wave by dividing the vicinity of bonding surface in the first imaging pattern into boundary elements, and obtaining a binding wave by solving an integral equation, and second imaging pattern creation means for creating a second imaging pattern by a mask, from the binding wave thus obtained and the first imaging pattern.SELECTED DRAWING: Figure 1 |
