发明名称 DIRECT-ACTING TABLE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a direct-acting table device in which a device length in an axial direction of a drive screw shaft having a right screw part and a left screw part is shortened, and on the other hand, a strengh of the drive screw shaft is sufficiently assured.SOLUTION: In a direct-acting table device 1, a diameter of a left screw part 11b or a right screw part 11a of a drive screw shaft 11 onto which a nut 32 for a weight table is externally mounted is so formed as to be larger than a diameter of the right screw part 11a or the left screw part 11b onto which a nut 12 for a main table is externally mounted, and a reed of the left screw part 11b or the right screw part 11a onto which the nut 32 for the weight table is externally mounted is so formed as to be smaller than a reed of the right screw part 11a or the left screw part 11b onto which the nut 12 for the main table is externally mounted. Further, a mass of the nut 32 for the weight table is so set as to be larger than a mass of the nut 12 for the main table.SELECTED DRAWING: Figure 1
申请公布号 JP2016083752(A) 申请公布日期 2016.05.19
申请号 JP20140220237 申请日期 2014.10.29
申请人 NSK LTD 发明人 MORIYAMA SHUN;OTANI YUJI;MATSUNAGA MIKI
分类号 B23Q1/72;B23Q1/58;G12B5/00;H01L21/027;H01L21/68 主分类号 B23Q1/72
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