发明名称 MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a measurement device that can reduce a measurement time.SOLUTION: A measurement device 100 includes: an optical pulse generating unit 10 capable of generating optical pulses with different wavelengths; an optical pulse dividing unit 20 dividing the optical pulses generated by the optical pulse generating unit 10 into a first optical pulse L1 and a second optical pulse L2; a terahertz wave generating unit 30 generating a terahertz wave by being irradiated with the first optical pulse L1; a terahertz wave detecting unit 50 irradiated with a terahertz wave having been applied to a measurement target sample to penetrate or be reflected from the sample and the second optical pulse L2; and a delay optical system 40 designed so that the length of the optical path of the second optical pulse L2 from the optical pulse dividing unit 20 to the terahertz wave detecting unit 50 is changed according to the wavelength of the second optical pulse L2.SELECTED DRAWING: Figure 1
申请公布号 JP2016085156(A) 申请公布日期 2016.05.19
申请号 JP20140219138 申请日期 2014.10.28
申请人 SEIKO EPSON CORP 发明人 FUKUOKA MASAYASU
分类号 G01N21/3586 主分类号 G01N21/3586
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