| 摘要 |
A deposition apparatus according to an embodiment of the present invention includes a chamber; a support part which is arranged in the chamber and supports a substrate; and an injection module which includes a first source part for injecting a first source material toward the support part, a second source part for injecting a second source material toward the support part, and a plasma injection part arranged between the first source part and the second source part. A plasma zone connected to the plasma injection part is formed in the injection module. The plasma zone includes an upper space of the first source part, the upper space of the second source part, and the upper space of the plasma injection part which are connected to each other. So, the size of the deposition apparatus can be reduced. |
