LIGHTING OPTICAL SYSTEM, EXPOSURE EQUIPMENT, LIGHTING METHOD, EXPOSURE METHOD AND DEVICE PRODUCING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a lighting optical system having high flexibility about modification of a shape and polarization of pupil intensity distribution without exchange of optics members.SOLUTION: A lighting optical system illuminating an irradiated surface by light from a light source has plural optical elements arranged in a prescribed plane and controlled individually, and comprises a space optical modulator forming light intensity distribution in a lighting pupil of the lighting optical system variably, and a polarization unit arranged at a position conjugate optically with the prescribed plane in a light path of an irradiated area side further than the space optical modulator, changes polarization of luminous flux of a part of incident light flux and emits it.SELECTED DRAWING: Figure 1