| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device capable of simplifying the constitution of a clamp device.SOLUTION: A substrate processing device includes a belt 11 for conveying a brittle material substrate, a pre-processing device for placing the brittle material substrate from the upper side of the belt 11 onto the belt 11, and a clamp device 40 for clamping the brittle material substrate placed on the belt 11. The clamp device 40 includes a substrate support part 51 having a fixed position to the belt 11, for supporting the brittle material substrate from the lower side, and an arm 57 rotatable and movable relative to the substrate support part 51, for sandwiching the brittle material substrate between itself and the substrate support part 51.SELECTED DRAWING: Figure 4 |
