| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detection system for improving detection performance for a defect (for instance, a scratch defect) on a test object hardly transmitting light.SOLUTION: The defect detection system includes a light source 110 for irradiating a test object 150 with light, a light blocking mask 120 arranged between the light source 110 and the test object 150, and imaging equipment 130 for receiving the light reflected from the test object 150 and capturing the video of the test object 150.SELECTED DRAWING: Figure 1 |
