| 摘要 |
PROBLEM TO BE SOLVED: To facilitate a work for moving a transportation unit to a position where the unit is facing against a processing chamber and connecting it to the processing chamber under a sealed state.SOLUTION: When a transportation unit 30 is moved to a position where it faces against a processing chamber H such as a heating chamber 10 or a cooling chamber 20 and the like and connected to this processing chamber under a sealed state, first connecting parts 130, 230 connecting the transportation unit are arranged at the opposing surface of the processing chamber and in turn the opposing surface part of the transportation unit is provided with a second connecting part 330 installed at the first connecting part. The second connecting part is provided with a protrusion part 331 protruded toward the processing chamber, a movable part 332 moved from the protrusion part toward the processing chamber and connected to the first connecting part, and a first seal member S1 sealing between the protrusion part and the movable part. A second seal member S2 for sealing between the movable part and the first connecting part is arranged in at least one of the movable part and the first connecting part under a state in which the movable part is connected to the first connecting part.SELECTED DRAWING: Figure 4 |
