| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a crystal oscillator having a step accurately and easily.SOLUTION: A method of manufacturing a crystal oscillator has a step for preparing a plurality of crystal wafers, a step for forming a crystal wafer laminate by laminating and bonding the plurality of crystal wafers each other, a step for forming an altered layer on each crystal wafer of the crystal wafer laminate, a step for forming a crystal piece having an altered layer by cutting the crystal wafer laminate on which an altered layer is formed, a step for forming a step in the crystal piece by etching an altered layer of the crystal piece, and a step for forming an electrode in the crystal piece in which a step is formed.SELECTED DRAWING: Figure 1 |
