COMPACT DIRECT DRIVE SPINDLE

摘要

A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link.

主权项

1. A substrate transport apparatus comprising:
a frame; at least one arm link movably connected to the frame; and a drive section connected to the frame for driving the at least one arm link and including stacked drive motors, each of the stacked drive motors having a housing, a motor stator mounted to the housing, a motor rotor disposed at least partially within the housing and a stator seal, the stator seal being disposed between the motor stator and motor rotor, surrounding the motor rotor and interfacing with a sealing housing surface facing the rotor to seal the motor stator from the motor rotor; wherein the stacked drive motors are stacked against each other and the housing sealing surface interfaced to the stacked stator seals of each respective stacked motor together forms a substantially continuous seal interface of the stacked drive motors sealed by the stacked stator seals to form a continuous barrier seal between the motor rotors and the motor stators.