发明名称 SEMICONDUCTOR CHIP MOUNTING METHOD AND SEMICONDUCTOR CHIP MOUNTING-USE PROTECTIVE SHEET
摘要 Provided are the following: an interposer used in three-dimensional mounting, or a protective sheet for protecting bumps provided to a semiconductor chip; and a three-dimensional mounting method that uses the protective sheet. More specifically, provided is a semiconductor chip mounting method in which, using a pressurizing and/or heating means, a substrate which has a plurality of bumps and a semiconductor chip which is placed on the substrate are pressurized and/or heated while being sandwiched and held, and as a result thereof, the semiconductor chip is mounted on the substrate. The semiconductor chip mounting method is characterized in that, if a site (bump site) where the plurality of bumps of the substrate are present is sandwiched and held by the pressurizing and/or heating means, pressurizing and/or heating is carried out with a protective sheet interposed between the pressurizing and/or heating means and the substrate, the protective sheet effectively only coming into contact with a substrate surface of the bump site.
申请公布号 WO2016076414(A1) 申请公布日期 2016.05.19
申请号 WO2015JP81958 申请日期 2015.11.13
申请人 TORAY ENGINEERING CO., LTD. 发明人 NOGAMI, YOSHIO;INAGAKI, JUN;UEHARA, HIDEO
分类号 H01L25/065;H01L21/60;H01L25/07;H01L25/18 主分类号 H01L25/065
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