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发明名称
電子線描画装置用部材およびそれを用いた電子線描画装置
摘要
申请公布号
JP5918000(B2)
申请公布日期
2016.05.18
申请号
JP20120100901
申请日期
2012.04.26
申请人
京セラ株式会社
发明人
古川 茂伸
分类号
H01L21/027;G03F1/78;G03F7/20
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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