DEPOSITION DECTECTING SENSOR AND DEPOSITING VELOCITY MEASURING DEVICE AND THIN FILM DEPOSITING APPARATUS

摘要

An objective of the present invention is to provide a deposition detecting sensor, and a depositing velocity measuring device; and a thin film depositing apparatus using the same which accurately measures the depositing velocity of a thin film by preventing a crack on a first electrode. The deposition detecting sensor comprises: a quartz crystal; a first electrode disposed on one surface of the quartz crystal; a second electrode disposed on an other surface of the quartz crystal; and a protective layer disposed on the first electrode to prevent deposition of a deposition material on the first electrode.