发明名称 半導体装置およびその製造方法並びに電子装置
摘要 <P>PROBLEM TO BE SOLVED: To suppress peeling at an interface of a bump joint. <P>SOLUTION: There is provided a semiconductor device comprising: an element 10 on which a first bump 32 is formed; and a substrate 20 on which a second bump 34 is formed and which has a thermal expansion coefficient different from that of the element. A terminal surface 33 of the first bump is formed so as to be inclined toward an inside of the element, a terminal surface 35 of the second bump is formed so as to correspond to the terminal surface of the first bump, and the terminal surface of the first bump and the terminal surface of the second bump are bonded. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5919641(B2) 申请公布日期 2016.05.18
申请号 JP20110100066 申请日期 2011.04.27
申请人 富士通株式会社 发明人 酒井 泰治;今泉 延弘;赤松 俊也
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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