| 摘要 |
PROBLEM TO BE SOLVED: To provide a load lock apparatus which stably maintains a workpiece, and a vacuum processing apparatus to which the load lock apparatus is appended.SOLUTION: A load lock apparatus carries in/out each substrate to the interior or the exterior of a vacuum chamber while maintaining the decompressed state in the vacuum chamber. The load lock apparatus includes a support base supporting a tray, which has a recessed part on which each substrate is placed, and a lid holding the substrate. An opening is provided at the vacuum chamber for carrying in/out the substrate. The opening of the vacuum chamber is closed by the lid from the exterior of the vacuum chamber and is also closed by the support base from the interior of the vacuum chamber to form a closed space shielded from the exterior and the interior of the vacuum chamber with walls of the vacuum chamber, the lid, and the support base. The load lock apparatus further includes ventilation means setting the closed space to an atmospheric pressure and exhaust means depressurizing the closed space. The lid has multiple protection members positioned on the outer side of the recessed part of the tray on which the substrate is placed when the closed space is formed. |
