LASER ILLUMINATION DEVICE

摘要

A semiconductor laser oscillator is formed by laser diodes arranged two-dimensionally in fast-axis and slow-axis directions. A laser beam emitted from the semiconductor laser oscillator is incident on a homogenizer. The homogenizer condenses the laser beam onto a long-length incident region at a surface to be irradiated. The homogenizer divides the laser beam into a plurality of beams with respect to a short-axis direction of the incident region, and superimposes the plurality of divided beams at the surface to be irradiated to cause the superimposed beams to be incident on the incident region. The slow-axis direction of the semiconductor laser oscillator is inclined with respect to a long-axis direction of the incident region.