发明名称 固体素子を有するデバイスの製造方法
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a device having a solid-state device which is hardly damaged. <P>SOLUTION: A method for manufacturing a device having a solid-state device comprises the steps of: preparing a flexible substrate 1 and a rigid substrate 2; forming an ultraviolet irradiation region 4 and an ultraviolet non-irradiation region by partly irradiating one side of the flexible substrate with ultraviolet ray 3 (first ultraviolet irradiation step); forming an ultraviolet irradiation region 5 by irradiating one side of the rigid substrate with the ultraviolet ray (second ultraviolet irradiation step); bringing an ultraviolet irradiation region 9 of the flexible substrate into contact with an ultraviolet irradiation region 11 of the rigid substrate so that one side of the ultraviolet irradiation region 9 and one side of the ultraviolet irradiation region 11 face with each other and forming a composite 6 to which the flexible substrate and the rigid substrate are directly adhering; forming a solid-state device 7 on an ultraviolet non-irradiation region 10 of the flexible substrate of the composite; cutting the flexible substrate in the ultraviolet non-irradiation region of the flexible substrate of the composite; and separating the rigid substrate from the composite. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5919708(B2) 申请公布日期 2016.05.18
申请号 JP20110216058 申请日期 2011.09.30
申请人 大日本印刷株式会社 发明人 小川 健一
分类号 H01L21/02;H01L21/336;H01L27/12;H01L29/786 主分类号 H01L21/02
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