| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a harmful gas detoxification method for controlling generation of deposits, and to provide a scrubber for executing the method. <P>SOLUTION: The scrubber 10 includes: a gas inlet 12 for introducing a treatment object gas containing a hydride gas; a gas outlet 14 for discharging the treatment object gas; an alkali supply device 36 for supplying an alkali aqueous solution at the gas outlet 14; a neutral water supply device 26 for supplying a neutral water at a gas inlet 12; a reservoir 22 for reserving a treatment liquid obtained by mixing the alkali aqueous solution with the neutral water; and a treatment liquid circulating pump 24 for transporting the treatment liquid reserved in the reservoir 22 to the gas inlet 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
