| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an X-ray optical device that is an X-ray concentrating imaging system that can be easily manufactured, is light weight, and has good imaging performance, and has dramatically improved reflectance and an energy band.SOLUTION: There is provided an X-ray optical device in which reflection films of HfOand AlOor the like are deposited with the accuracy at sub nm level by using an atomic layer deposition method, on a lateral wall having a curved surface hole structure produced in silicon and nickel that are materials having a fine structure by using a micromachining technology. |
