SUBSTRATE WORKING DEVICE, SUBSTRATE WORKING METHOD, AND SUBSTRATE WORKING SYSTEM

摘要

This substrate working device (1) includes a transportation portion (12) performing introduction/discharge of a substrate (CB), a working portion (11) performing prescribed work processing on the substrate, and a control portion (14) acquiring a compatibility/incompatibility status as to whether or not an operator is compatible with an operator operation request requesting the operator to perform a prescribed operation. The control portion switches a running mode for automatic running to a normal mode and to a continuation preference mode in which the operator operation request is harder to generate than in the normal mode in response to the compatibility/incompatibility status.