发明名称 OPTICAL APPARATUS, PROCESSING APPARATUS, AND ARTICLE MANUFACTURING METHOD
摘要 An optical apparatus is provided. The apparatus comprises a rotatable reflecting member including a first reflecting surface and a second reflecting surface, an optical system configured to sequentially reflect, by a plurality of reflecting surfaces included therein, light reflected by the first reflecting surface and cause the light to be incident on the second reflecting surface, and an adjusting device configured to change a rotation angle of the reflecting member to adjust an optical path of light that is reflected by the second reflecting surface and exits the second reflecting surface.
申请公布号 EP3021153(A1) 申请公布日期 2016.05.18
申请号 EP20150003083 申请日期 2015.10.28
申请人 CANON KABUSHIKI KAISHA 发明人 KUME, MASAHARU
分类号 G02B19/00;B23K26/06;G02B7/182;G02B26/10 主分类号 G02B19/00
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