| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device or a charged particle beam microscope which allows for observation even of a large sample in the atmosphere or gas atmosphere.SOLUTION: A charged particle beam device configured to employ a thin film partitioning the vacuum atmosphere and the atmosphere (or gas atmosphere) includes a charged particle beam optical barrel housing a charged particle beam optical system while maintaining the vacuum state on the inside, a sample stage opened to the atmosphere and mounting the sample, a thin film arranged to partition a space communicating with the charged particle beam optical barrel and a space where the sample stage is arranged, and transmitting the primary charged particle beam, and a drive mechanism for adjusting the distance between the thin film and the sample by driving the thin film in the vertical direction. |
