发明名称 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR FORMING POLYIMIDE RESIN PATTERNS, AND PATTERNED POLYIMIDE RESIN FILM
摘要 Provided is a positive photosensitive resin composition containing a polyimide resin that allows patterns to be satisfactorily formed by means of photolithography, and provides patterns with excellent heat resistance. Further provided is a method for forming polyimide resin patterns using the positive photosensitive resin composition. Further provided is a patterned polyimide resin film formed by means of the method for forming polyimide resin patterns. To the photosensitive resin composition are added, an (A) polyimide resin, and a (B) compound in which an imidazole compound having a specific structure is generated by the action of light.
申请公布号 EP2913714(A4) 申请公布日期 2016.05.18
申请号 EP20130848508 申请日期 2013.10.25
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 NODA, KUNIHIRO;CHISAKA, HIROKI;SHIOTA, DAI
分类号 G03F7/039;G03F7/004;G03F7/20;G03F7/26;H01L21/027 主分类号 G03F7/039
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