发明名称 |
Method for gas detection with potential controlled gas sensor |
摘要 |
A potential-controlled gas sensor comprises a gas-sensitive region (5) which can be polarized independent of moisture and has a relative dielectric constant ( epsilon ) depending on the moisture. An Independent claim is also included for a process for gas detection comprising changing a relative dielectric constant ( epsilon ) of at least one polarizable gas-sensitive region, and measuring a potential change ( DELTA phi ) using the change in the relative dielectric constant. Preferred Features: The degree of the gas-sensitive layer can be changed using a control signal, especially a voltage. The gas-sensitive region contains an electret, especially BaCO3. The gas sensor contains several gas-sensitive regions with different layer thicknesses. |
申请公布号 |
EP1176418(B1) |
申请公布日期 |
2016.05.18 |
申请号 |
EP20010106135 |
申请日期 |
2001.03.13 |
申请人 |
MICRONAS GMBH |
发明人 |
FLEISCHER, MAXIMILIAN, DR.;MEIXNER, HANS, PROF.;OSTRICK, BERNHARD;POHLE, ROLAND, DR.;SIMON, ELFRIEDE, DR. |
分类号 |
G01N27/414;G01N27/00;G01N27/22;G01N33/00 |
主分类号 |
G01N27/414 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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