Liquid phase laser ablation method and apparatus

摘要

A liquid phase laser ablation apparatus is provided, which includes a vessel for storing liquid in which a component to be atomized is arranged; a laser oscillating device for oscillating a laser light irradiated to the component through the liquid; a reflecting mirror configured to freely change an angle of incidence of the laser light with respect to a surface of the liquid; a focusing lens for focusing the laser light oscillated from the laser oscillating device; a cover body for covering an upper surface of the vessel; and a laser light introduction port provided on the cover body or a side surface of the vessel above the surface of the liquid. Accordingly, liquid will not adhere to optical components constituting the apparatus, there is little contamination and damage to the optical components, and laser ablation can occur in a continuous and stable manner for a long period of time.

主权项

1. A liquid phase laser ablation apparatus comprising:
a vessel having an interior storing liquid and a component to be atomized, the component to be atomized being arranged in the liquid; a laser oscillating device configured to oscillate a laser light and to irradiate the component through the liquid; a reflecting mirror configured to freely change an angle of incidence of the oscillated laser light with respect to an upper surface of the liquid; a focusing lens configured to focus the oscillated laser light; a cover body configured to cover an upper surface of the vessel; and a laser light introduction pipe extending above the upper vessel surface at the angle of incidence and opening into the vessel interior at a laser light introduction port provided above the upper liquid surface on either the cover body or on a side surface of the vessel distinct from the upper vessel surface, wherein said angle of incidence of the laser light with respect to the surface of the liquid is set to a predetermined angle exceeding 0 degrees and which is less than 80 degrees.