发明名称 Electro-optic PN junction modulator formed with a self-aligned process
摘要 An electro-optic device, comprising a layer of light-carrying material; and a rib, projecting from the layer of light-carrying material, for guiding optical signals propagating through the device. The layer of light-carrying material comprises a first doped region of a first type extending into the rib, and a second doped region of a second, different type extending into the rib such that a pn junction is formed within the rib. The pn junction extends substantially parallel to at least two contiguous faces of the rib, resulting in a more efficient device. In addition, a self-aligned fabrication process can be used in order to simplify the fabrication process and increase reliability and yield.
申请公布号 US9343638(B2) 申请公布日期 2016.05.17
申请号 US201113578837 申请日期 2011.02.17
申请人 University of Southampton 发明人 Gardes Frederic;Thomson David;Reed Graham
分类号 G02F1/035;G02B6/12;H01L33/58;G02F1/35;G02F1/29;G02F1/025;G02F1/21;G02F1/015 主分类号 G02F1/035
代理机构 代理人 Reingand Nadya
主权项 1. An electro-optic device, comprising: a layer of light-carrying material; and a rib, projecting from the layer of light-carrying material, for guiding optical signals propagating through the device; wherein the layer of light-carrying material comprises a first doped region of a first type extending into the rib, and a second doped region of a second, different type extending into the rib such that a pn junction is formed within the rib, substantially parallel to at least three contiguous faces of the rib such that said junction forms a wrap-around π shape in cross-section.
地址 Southampton GB