发明名称 ROTARY TYPE WIRE-SAW DEVICE
摘要 The present invention provides a rotational wire-saw device capable of increasing a processing speed and improving the surface flatness of a cut surface. According to the present invention, the wire-saw device, cutting an ingot by using a wire, includes: a wire supply bobbin; a wire winding bobbin on which the wire, supplied from the wire supply bobbin, is wound; multiple guide rollers placed between the wire supply bobbin and the wire winding bobbin, winding the wire in a spiral shape, and inducing the wire; a nozzle supplying cutting liquid to the wire; a holder to which the ingot is fixed; an operating part rotating the holder; and a transfer part connected with the operating part to transfer the operating part to the wire.
申请公布号 KR101621455(B1) 申请公布日期 2016.05.17
申请号 KR20150032985 申请日期 2015.03.10
申请人 WONIK QNC CORPORATION 发明人 HEO, WOO SEOK
分类号 H01L23/00;H01L21/78 主分类号 H01L23/00
代理机构 代理人
主权项
地址