Apparatus to support a cleanspace fabricator

摘要

The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools. Support aspects include support structure for processing tools, a clean environment carrier for a single substrate, and a quick disconnect flange which facilitates connecting and disconnect of electrical, liquid and gas utilities to a processing tool placed in the fabricator.

主权项

1. A fab for processing a substrate, the fab comprising:
a primary cleanspace, a secondary space independent of the cleanspace, and a first wall between the primary cleanspace and the secondary space; a first processing tool comprising a tool body and a tool port, the first processing tool configured to process a substrate; a processing tool positioning apparatus comprising a chassis for mounting the first processing tool onto, said chassis comprising:
a chassis plate comprising a mating surface for receiving the tool body of the first processing tool, anda base plate for positioning the chassis plate in an extended position and a closed position; wherein when the first processing tool is mated to the chassis plate and the chassis plate is in the closed position, the tool port penetrates through the first wall, is sealed with respect to the first wall and is positioned within the primary cleanspace and the tool body of the first processing tool is exterior to the primary cleanspace within the secondary space; and wherein when the first processing tool is mated to the chassis plate and the chassis plate assumes the extended position, the tool port is removed from the primary cleanspace without requiring removal of an adjacent processing tool.