| 摘要 |
The present invention relates to a connecting joint for a drain pipe of semiconductor manufacturing equipment, and more specifically, to a connecting joint for a drain pipe of semiconductor manufacturing equipment, which provides a joint optimized for a drain pipe made of heteromaterials, which are stainless steel (outer pipe) and high-density polyethylene (inner pipe), used in a semiconductor manufacturing process. According to the present invention, the connecting joint for a drain pipe of semiconductor manufacturing equipment, which is used to connect drain pipes made of heteromaterials used in a semiconductor manufacturing process, comprises: a joint body which has insertion spaces on both sides with respect to a protrusion formed at an inner center thereof, an inclined plane formed such that a diameter thereof gradually increases from an end portion of the insertion space to the outside, and male screws formed on both outer peripheral surfaces of the joint body; pressurizing nuts which are respectively coupled to both sides of the joint body and have female screws formed on inner peripheral surfaces thereof so as to be coupled to the male screws of the joint body; a leakage prevention cap which is coupled to the insertion space of the joint body and into which a drain pipe is inserted; a packing member which is inserted to closely contact the inclined surface of the joint body and is airtightly maintained; a washer which is disposed in the rear of the packing member to press and support the packing member; and a deviation prevention member which is inserted into the pressuring nut and supports the packing member and the washer so as not to be deviated from each other. |
