| 发明名称 | Actuator, optical scanner, and image forming apparatus | ||
| 摘要 | An actuator including a movable portion that swings about a swing axis, a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion, and a support portion that supports the connecting portion, wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view, and the movable portion, the support portion, and the connecting portion are formed by anisotropically etching a silicon substrate. | ||
| 申请公布号 | US9343946(B2) | 申请公布日期 | 2016.05.17 |
| 申请号 | US201414565002 | 申请日期 | 2014.12.09 |
| 申请人 | Seiko Epson Corporation | 发明人 | Hino Makiko;Mizoguchi Yasushi |
| 分类号 | G06F3/12;H02K33/16;G02B26/10;H04N3/08;G02B7/182;B81B3/00;G06F15/00;G02B26/08;G03B27/52 | 主分类号 | G06F3/12 |
| 代理机构 | Harness, Dickey & Pierce, P.L.C. | 代理人 | Harness, Dickey & Pierce, P.L.C. |
| 主权项 | 1. An actuator comprising: a movable portion that swings about a swing axis; a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion; and a support portion that supports the connecting portion, wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view. | ||
| 地址 | JP | ||