发明名称 Bias reduction in force rebalanced accelerometers
摘要 A system is provided for the continuous reduction, in real time, of bias in a force rebalanced accelerometers having a proof mass coupled to an accelerometer housing by a flexure suspension. The system comprises a closed loop, force rebalance servo that provides control voltage to the proof mass to null an electrical pickoff signal that indicates the motion of the proof mass with respect to the accelerometer housing, wherein a time varying disturbance signal is injected into the force rebalance servo that results in the generation of a time varying voltage in the output of the force rebalance servo that corresponds to a magnitude of the net positive spring of the combined flexure suspension and electrostatic springs acting on the proofmass. The system also comprises a negative electrostatic spring servo that applies a negative electrostatic spring DC voltage to each of a pair of negative electrostatic forcer electrodes.
申请公布号 US9341646(B2) 申请公布日期 2016.05.17
申请号 US201213720231 申请日期 2012.12.19
申请人 Northrop Grumman Guidance and Electronics Company, Inc. 发明人 Stewart Robert E.
分类号 G01P15/00;G01P21/00;G01P15/13;G01P15/125 主分类号 G01P15/00
代理机构 Tarolli, Sundheim, Covell & Tummino LLP 代理人 Tarolli, Sundheim, Covell & Tummino LLP
主权项 1. A system for reducing bias in an accelerometer having a proofmass coupled to an accelerometer housing by a flexure suspension and a pair of negative electrostatic forcer electrodes spaced apart from the proofmass on opposing sides, the system comprising: a force rebalance servo that provides a control voltage to the proofmass in response to an electrical pickoff signal, the electrical pickoff signal indicating motion of the proofmass relative to the accelerometer housing, wherein a predetermined time varying disturbance signal is injected into the force rebalance servo that results in the generation of a time varying voltage in the control voltage, the time varying voltage corresponding to a magnitude of a net positive spring force of the combined flexure suspension and electrostatic spring associated with bias voltages acting on the proofmass as the proofmass moves in response to the time varying voltage in the control voltage; and a negative electrostatic spring servo that applies a negative electrostatic spring DC voltage to the pair of negative electrostatic forcer electrodes to cancel the net positive spring force of the combined flexure suspension and electrostatic spring associated with bias voltages acting on the proofmass in response to the nulling of the time varying voltage from the control voltage.
地址 Woodland Hills CA US