Methods of making inkjet print heads using a sacrificial substrate layer

摘要

A method of making inkjet print heads may include forming a first wafer including a sacrificial substrate layer, and a first dielectric layer thereon having first openings therein defining inkjet orifices. The method may also include forming a second wafer having inkjet chambers defined thereon, and joining the first and second wafers together so that each inkjet orifice is aligned with a respective inkjet chamber. The method may further include removing the sacrificial substrate layer thereby defining the inkjet print heads.

主权项

1. A method of making a plurality of inkjet print heads comprising:
forming a first wafer comprising a sacrificial substrate layer, and a first dielectric layer thereon having a plurality of first openings therein defining a plurality of inkjet orifices; forming a second wafer having a plurality of inkjet chambers defined thereon, the second wafer being formed physically independent of the first wafer; joining the first and second wafers together, by bringing together the physically independently formed first and second wafers, so that each inkjet orifice is aligned with a respective inkjet chamber; and removing the sacrificial substrate layer thereby defining a plurality of inkjet print heads.