Heater jacket for a fluid line

摘要

A heater jacket for a fluid line including a tube having an inner surface and an outer surface; a spacer disposed within the tube between the inner surface and the fluid line; and wherein the spacer includes a hole for receiving the fluid line therein and spaces the fluid line from the tube inner surface.

主权项

1. A heater jacket for a fluid line comprising:
a tube having an inner surface, an outer surface and an attachment mechanism to permit installation and removal of the tube from a fluid line by attaching free ends of the heater jacket together; a heating element between the inner surface and the outer surface; a spacer disposed within the tube between the inner surface and the fluid line configured to define a cavity between the inner surface and the fluid line, said cavity configured to allow radiant heat from the heating element to heat fluid within the fluid line and to prevent the heater jacket contacting the fluid line; and wherein the spacer includes a hole for receiving the fluid line therein and spaces the fluid line from the tube inner surface, and wherein the fluid line is configured to transport a fluid from a precursor source to a reaction chamber.