Continuous scan type measuring apparatus

摘要

A continuous scan type measuring apparatus includes a continuous scan type optical application measuring instrument, a single-axis measuring instrument scanning stage and two carrier stages. The continuous scan type optical application measuring instrument performs a surface shape measurement of a measuring object. The single-axis measuring instrument scanning stage carries the optical application measuring instrument and causes the optical application measuring instrument to perform continuous scanning along a predetermined direction. The two carrier stages are detachably mount respective measuring objects thereon and move independently of each other. The two carrier stages are positioned independently at one of a measurement position within a scanning range of the optical application measuring instrument and a replacement position of the measuring objects. A carrier stage, which is at the measurement position and on which the measuring object subjected to the surface shape measurement is mounted, is fixed during the continuous scanning.

主权项

1. A continuous scan type measuring apparatus comprising:
an optical application measuring instrument configured to perform a surface shape measurement of a measuring object; a single-axis measuring instrument scanning stage configured to carry the optical application measuring instrument, causing the optical application measuring instrument to perform continuous scanning along a predetermined direction; and two carrier stages configured to detachably mount respective measuring objects thereon and configured to move independently of each other, wherein the two carrier stages are positioned independently at one of a measurement position of the optical application measuring instrument and a replacement position of the measuring objects, and a carrier stage, which is at the measurement position and on which the measuring object subjected to the surface shape measurement is mounted, is fixed during the continuous scanning, the optical application measuring instrument performs, while the measuring object which has been measured is being replaced with a next measuring object with one of the two carrier stages positioned at the replacement position, the surface shape measurement of the measuring object on an other of the two carrier stages positioned at the measurement position, the single-axis measuring instrument scanning stage causes the optical application measuring instrument to perform continuous scans repeatedly along the predetermined direction at intervals of a predetermined waiting time when a measurement width covered by the optical application measuring instrument in an orthogonal direction to the predetermined direction is smaller than a width of the measuring object in the orthogonal direction, and when the continuous scans are performed repeatedly, the carrier stage, which is at the measurement position and on which the measuring object subjected to the surface shape measurement is mounted, is fixed during a time of the continuous scanning, and moves, during the predetermined waiting time, in the orthogonal direction by a width equal to or smaller than the measurement width in the orthogonal direction.