| 发明名称 | Method for controlling an RF generator | ||
| 摘要 | An RF generator and a method of controlling same includes an RF source; a DC source; and an RF amplifier comprising an RF input, a DC input, and an RF output, the RF amplifier configured to receive an RF signal at the RF input, receive a DC voltage at the DC input, and provide an output power at the RF output; a control unit operably coupled to the DC source and RF source, the control unit configured to receive a power setpoint for the RF output, determine a power dissipation at the RF generator, alter the DC voltage, and repeat the alteration of the DC voltage until determining a final DC voltage that decreases the power dissipation at the RF generator while enabling the output power at the RF output to be equal to or greater than the power setpoint. | ||
| 申请公布号 | US9345122(B2) | 申请公布日期 | 2016.05.17 |
| 申请号 | US201514700209 | 申请日期 | 2015.04.30 |
| 申请人 | Reno Technologies, Inc. | 发明人 | Bhutta Imran Ahmed |
| 分类号 | H01J7/24;H05H1/46;H01L21/3065;H01L21/02 | 主分类号 | H01J7/24 |
| 代理机构 | The Belles Group, P.C. | 代理人 | The Belles Group, P.C. |
| 主权项 | 1. An RF generator comprising: an RF amplifier comprising an RF input, a DC input, and an RF output, the RF amplifier configured to: receive at the RF input an RF signal from an RF source;receive at the DC input a DC voltage from a DC source; andprovide an output power at the RF output; a control unit operably coupled to the DC source and the RF source, the control unit configured to: receive a power setpoint for the RF output; determine a power dissipation at the RF generator; alter the DC voltage; and repeat the alteration of the DC voltage until determining a final DC voltage that decreases the power dissipation at the RF generator while enabling the output power at the RF output to be equal to or greater than the power setpoint. | ||
| 地址 | Wilmington DE US | ||