发明名称 |
Laser marking in packages |
摘要 |
A package includes a device die, a first plurality of redistribution lines underlying the device die, a second plurality of redistribution lines overlying the device die, and a metal pad in a same metal layer as the second plurality of redistribution lines. A laser mark is in a dielectric layer that is overlying the metal pad. The laser mark overlaps the metal pad. |
申请公布号 |
US9343434(B2) |
申请公布日期 |
2016.05.17 |
申请号 |
US201414192341 |
申请日期 |
2014.02.27 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Chen Hsien-Wei |
分类号 |
H01L23/02;H01L25/065;H01L25/00;H01L23/00;H01L23/48;H01L23/544;H01L23/58;H01L21/768;H01L23/31 |
主分类号 |
H01L23/02 |
代理机构 |
Slater Matsil, LLP |
代理人 |
Slater Matsil, LLP |
主权项 |
1. A package comprising:
a first package comprising:
a device die;a first plurality of redistribution lines underlying the device die;a second plurality of redistribution lines overlying the device die;a metal pad in a same metal layer as the second plurality of redistribution lines; anda laser mark in a dielectric layer, wherein the dielectric layer is overlying the metal pad, and wherein the laser mark overlaps the metal pad. |
地址 |
Hsin-Chu TW |