发明名称 Laser marking in packages
摘要 A package includes a device die, a first plurality of redistribution lines underlying the device die, a second plurality of redistribution lines overlying the device die, and a metal pad in a same metal layer as the second plurality of redistribution lines. A laser mark is in a dielectric layer that is overlying the metal pad. The laser mark overlaps the metal pad.
申请公布号 US9343434(B2) 申请公布日期 2016.05.17
申请号 US201414192341 申请日期 2014.02.27
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Chen Hsien-Wei
分类号 H01L23/02;H01L25/065;H01L25/00;H01L23/00;H01L23/48;H01L23/544;H01L23/58;H01L21/768;H01L23/31 主分类号 H01L23/02
代理机构 Slater Matsil, LLP 代理人 Slater Matsil, LLP
主权项 1. A package comprising: a first package comprising: a device die;a first plurality of redistribution lines underlying the device die;a second plurality of redistribution lines overlying the device die;a metal pad in a same metal layer as the second plurality of redistribution lines; anda laser mark in a dielectric layer, wherein the dielectric layer is overlying the metal pad, and wherein the laser mark overlaps the metal pad.
地址 Hsin-Chu TW